IS Series Photoresist Spray Coater for Uneven Surfaces
Ideal for semiconductor, MEMS, and sensor devices! Thin film coating equipment for research and development of photoresists and functional materials.
The "IS Series" is a compact and lightweight thin film coating device that can be installed on a lab table. It provides thin film coatings that accommodate the shapes of step surfaces and edges of uneven devices. It allows for the standardization of optimal conditions for coating three-dimensional (3D) substrates. Additionally, it uses a special atomizing method to coat with optimal fine particles. 【Coating Features】 - Good coating is possible on fine uneven shapes that can be applied by spin coating. - Excellent thin film coating with good step coverage is achievable. - Film thickness formation from 100nm to 100μm is possible (photoresist, FC catalyst film). - A remarkably high liquid usage efficiency of 75% (in contrast, spin coating typically achieves a few percent). - Coating is possible with a small amount of rare materials, around a few cc. - Special intermittent and stable brush application is possible (dispersion liquid, FC catalyst liquid, etc.). Acing Technologies offers solutions for functional thin film coatings. We provide consulting and research support for surrounding technologies. *Please contact us through the inquiry page on our company homepage for any questions or consultations.
- Company：エーシングテクノロジーズ 湘南藤沢研究所
- Price：Other
